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Analysis of Fine Particles in LSI Using Auger Electron Spectroscopy (1)

[As of April, 2011]

Purpose
To find out the cause of threadlike particles generation observed in the LSI. (Figure 1)
Analysis and Result
Figure 2 shows the cross-section of the particles observed using SEM.
As a result of Auger electron surface analysis, Ti and Al were detected in the particles. The particles were found to be wiring residue that remained between metal wiring and adhered to the wiring in the early phase of passivation film formation. (Figure 3)

This is [Figure 1 SEM Image].

Figure 1 SEM Image

This is [Figure 2 Cross-Sectional SEM Image].

Figure 2 Cross-Sectional SEM Image

This is [Figure 3 Auger Electron Cross-Sectional Analysis].

Figure 3 Auger Electron Cross-Sectional Analysis